====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     2.E+05 A   Layer # 1- Density = 4.632E22 atoms/cm3 = .534 g/cm3
  Layer # 1- Li = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   107.2E+03 A   Straggling =   554.6E+01 A
 Ion Lateral Range =   548.8E+01 A   Straggling =   691.1E+01 A
 Ion Radial  Range =   850.7E+01 A   Straggling =   451.7E+01 A
====================================================================
 Range Skewne- = 005.9458  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = -130.9155  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Li    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
150001.E-02  0.0000E+00  1.5289E+06
300001.E-02  0.0000E+00  1.7481E+06
450001.E-02  0.0000E+00  1.6829E+06
600001.E-02  0.0000E+00  1.8341E+06
750001.E-02  0.0000E+00  1.8803E+06
900001.E-02  0.0000E+00  1.8964E+06
105000.E-01  0.0000E+00  2.0219E+06
120000.E-01  0.0000E+00  1.9283E+06
135000.E-01  0.0000E+00  2.0373E+06
150000.E-01  0.0000E+00  1.9889E+06
165000.E-01  0.0000E+00  2.0974E+06
180000.E-01  0.0000E+00  2.1706E+06
195000.E-01  0.0000E+00  2.2537E+06
210000.E-01  0.0000E+00  2.3457E+06
225000.E-01  0.0000E+00  2.3552E+06
240000.E-01  0.0000E+00  2.4091E+06
255000.E-01  0.0000E+00  2.4724E+06
270000.E-01  0.0000E+00  2.4684E+06
285000.E-01  0.0000E+00  2.5555E+06
300000.E-01  0.0000E+00  2.7162E+06
315000.E-01  0.0000E+00  2.7403E+06
330000.E-01  0.0000E+00  2.7622E+06
345000.E-01  0.0000E+00  2.8105E+06
360000.E-01  0.0000E+00  2.9117E+06
375000.E-01  0.0000E+00  2.9013E+06
390000.E-01  0.0000E+00  3.0693E+06
405000.E-01  0.0000E+00  3.1852E+06
420000.E-01  0.0000E+00  3.3725E+06
435000.E-01  0.0000E+00  3.2331E+06
450000.E-01  0.0000E+00  3.3241E+06
465000.E-01  0.0000E+00  3.5638E+06
480000.E-01  0.0000E+00  3.5600E+06
495000.E-01  0.0000E+00  3.8324E+06
510000.E-01  0.0000E+00  3.8477E+06
525000.E-01  0.0000E+00  4.0891E+06
540000.E-01  0.0000E+00  3.9324E+06
555000.E-01  0.0000E+00  4.1001E+06
570000.E-01  0.0000E+00  4.2801E+06
585000.E-01  0.0000E+00  4.3283E+06
600000.E-01  0.0000E+00  4.4137E+06
615000.E-01  0.0000E+00  4.6371E+06
630000.E-01  0.0000E+00  4.7207E+06
645000.E-01  0.0000E+00  5.0421E+06
660000.E-01  0.0000E+00  5.1070E+06
675000.E-01  0.0000E+00  5.5563E+06
690000.E-01  0.0000E+00  5.5785E+06
705000.E-01  0.0000E+00  5.6118E+06
720000.E-01  0.0000E+00  5.9606E+06
735000.E-01  6.6667E+01  6.1864E+06
750000.E-01  0.0000E+00  6.2857E+06
765000.E-01  0.0000E+00  6.5203E+06
780000.E-01  6.6667E+01  6.6863E+06
795000.E-01  0.0000E+00  6.9024E+06
810000.E-01  0.0000E+00  7.3957E+06
825000.E-01  6.6667E+01  7.6415E+06
840000.E-01  1.3333E+02  8.2035E+06
855000.E-01  6.6667E+01  8.6704E+06
870000.E-01  6.6667E+01  9.1280E+06
885000.E-01  6.6667E+01  9.5690E+06
900000.E-01  3.3333E+02  1.0185E+07
915000.E-01  6.0000E+02  1.0591E+07
930000.E-01  2.0000E+02  1.1032E+07
945000.E-01  5.3333E+02  1.2217E+07
960000.E-01  1.8667E+03  1.2533E+07
975000.E-01  1.4000E+03  1.3277E+07
990000.E-01  1.7333E+03  1.3936E+07
100500.E+00  2.1333E+03  1.4683E+07
102000.E+00  3.2667E+03  1.5073E+07
103500.E+00  4.0000E+03  1.5568E+07
105000.E+00  5.6000E+03  1.5741E+07
106500.E+00  6.2667E+03  1.4862E+07
108000.E+00  6.7333E+03  1.3835E+07
109500.E+00  7.6000E+03  1.1628E+07
111000.E+00  5.6000E+03  9.4229E+06
112500.E+00  4.7333E+03  7.8793E+06
114000.E+00  4.2000E+03  6.2062E+06
115500.E+00  3.5333E+03  4.6828E+06
117000.E+00  3.2000E+03  3.1844E+06
118500.E+00  1.5333E+03  1.6942E+06
120000.E+00  7.3333E+02  8.9460E+05
121500.E+00  3.3333E+02  5.0500E+05
123000.E+00  6.6667E+01  2.0293E+05
124500.E+00  0.0000E+00  1.6140E+05
126000.E+00  0.0000E+00  9.3800E+04
127500.E+00  0.0000E+00  5.7333E+04
129000.E+00  0.0000E+00  4.5733E+04
130500.E+00  0.0000E+00  1.6933E+04
132000.E+00  0.0000E+00  2.0000E+03
133500.E+00  0.0000E+00  2.7333E+03
135000.E+00  0.0000E+00  2.8000E+03
136500.E+00  0.0000E+00  0.0000E+00
138000.E+00  0.0000E+00  0.0000E+00
139500.E+00  0.0000E+00  0.0000E+00
141000.E+00  0.0000E+00  0.0000E+00
142500.E+00  0.0000E+00  0.0000E+00
144000.E+00  0.0000E+00  0.0000E+00
145500.E+00  0.0000E+00  0.0000E+00
147000.E+00  0.0000E+00  0.0000E+00
148500.E+00  0.0000E+00  0.0000E+00
150000.E+00  0.0000E+00  0.0000E+00
